Characteristics of high-speed hollow shaft motor

1. Panasonic driver+hollow shaft motor ensures long-term and efficient stable operation of quality
2. Structure of hollow shaft high-speed motor: Rated speed: 5000rpm, maximum speed 6000-8000rpm
3. Super fast acceleration/deceleration time: 47750R/S2
4. Low noise, low vibration, and shaft end runout coefficient as low as 0.01mm
5. The shaft hole adopts a vacuum hollow shaft design, and the unique design of the shaft end ensures smooth operation of the chunk
6. Motor power: 750/1000W, designed with a water cooling system, meeting the requirements of wafers at 6:00, 8:00, and 12:00
7. Customized shaft end design can be provided for different users

Specification and application fields of high-speed hollow shaft servo products

1.750W/1000W-5000，6000rpm
2. Application areas (high-end models)
3.8-inch and 12 inch semiconductor equipment
4. Coating, developing, cleaning, etching and other processes
5. The maximum acceleration can reach 47750R/S2 instantaneous acceleration

Application scope of high-speed hollow motor:

1. Exposure and development equipment (coating, development) is the main equipment for photolithography processing programs and controls coating, exposure, and development.
2. Cleaning, gluing, developing and removing equipment.
3. It is suitable for physical flushing cleaning, particle cleaning and spray process.

高速中空轴电机应用方案拓扑图

Spin Motor motor characteristics

High speed motor structure: rated speed: 5000rpm, maximum speed: 6000rpm
Ultra fast acceleration/deceleration time: 47750R/S2
Low noise, low vibration, and low shaft end runout coefficient
Maximizing the machining accuracy of hollow shafts and meeting extremely low mechanical tolerance machining requirements
Adopting a vacuum hollow shaft design and a unique shaft end design to ensure smooth operation of the chunk
Designed with a water cooling system: 750/1000W
We can provide customized design of specialized motors for customers

Application: High end gluing and cleaning

Requirement: High speed rotation and vacuum adsorption
Application specification requirements:
1. Lanfa: 80mm~100mm flange
2. Speed range: 5000rpm~6000rpm, maximum acceleration: 47750
3. Rated torque: 0.64Nm~2.50Nm (power 0.3-0.7KW)
4. Shaft customization: Customization of motor shaft length or sealing mechanism